Determination of the two-dimensional distribution of plasma parameters in an atmospheric microwave plasma

Author

Moon, Se Youn ; Choe, W. ; Hwang, Y.S. ; Choi, J.J.

Author_Institution

Korea Adv. Inst. of Sci. & Technol., South Korea

fYear

2002

fDate

26-30 May 2002

Firstpage

145

Abstract

Summary form only given. Using a 2.45 GHz microwave source, Ar-O/sub 2/ plasma was produced at atmospheric pressure in an azimuthally symmetric geometry. Optical emission spectroscopic method was used to measure the line-of-sight integrated emission spectrum at different microwave power and gas flow rate. A two-dimensional (r,z) distribution of the plasma density, electron temperature, and gas temperature was obtained by means of Abel inversion analysis. From the result, the effect of the ambient air on the atmospheric microwave plasma was investigated.

Keywords

argon; oxygen; plasma density; plasma diagnostics; plasma pressure; plasma production; plasma temperature; temperature distribution; 2.45 GHz; Abel inversion analysis; Ar-O/sub 2/; Ar-O/sub 2/ plasma; ambient air; atmospheric microwave plasma; atmospheric pressure; azimuthally symmetric geometry; electron temperature; gas flow rate; gas temperature; line-of-sight integrated emission spectrum; microwave power; microwave source; optical emission spectroscopic method; plasma density; plasma parameters; two-dimensional distribution; Atmospheric-pressure plasmas; Electron optics; Geometrical optics; Integrated optics; Plasma density; Plasma measurements; Plasma sources; Plasma temperature; Stimulated emission; Temperature distribution;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 2002. ICOPS 2002. IEEE Conference Record - Abstracts. The 29th IEEE International Conference on

Conference_Location

Banff, Alberta, Canada

Print_ISBN

0-7803-7407-X

Type

conf

DOI

10.1109/PLASMA.2002.1030333

Filename

1030333