DocumentCode
2206177
Title
Design Parameters Optimization Using Process Variations of the Pull-In Voltage for MEMs
Author
Voicu, R. ; Tibeica, C. ; Bazu, M.
Author_Institution
Nat. Inst. for R&D in Microtechnologies, Bucharest
fYear
0
fDate
0-0 0
Firstpage
244
Lastpage
247
Abstract
Probability density function for the pull-in voltage of the electrostatically actuated micro-bridges due to variations of some dimensional parameters was estimated using Monte Carlo approach. Variations of the pull-in voltage were analyzed in order to find out optimum design parameters taking into account the given process variations in manufacturing micro-bridge structures
Keywords
Monte Carlo methods; electrostatic actuators; micromechanical devices; MEMS; Monte Carlo approach; microbridge structures; probability density function; process variation; pull-in voltage; Bridge circuits; Design optimization; Electrodes; Gold; Microelectromechanical devices; Micromechanical devices; Monte Carlo methods; Parameter estimation; Probability density function; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics, 2006 25th International Conference on
Conference_Location
Belgrade
Print_ISBN
1-4244-0117-8
Type
conf
DOI
10.1109/ICMEL.2006.1650942
Filename
1650942
Link To Document