Designing and Modeling MEMS Resonator in VHF Range

Author

Al Khusheiny, M. ; Majlis, B.Y.

Author_Institution

Inst. of Microengineering & Nanoelectronic, Universiti Kebangsaan, Selangor

fYear

0

fDate

0-0 0

Firstpage

256

Lastpage

259

Abstract

In this paper a new structure of clamped-clamped mixed muresonator (CCMR) of resonance frequency (f_o) of 71 MHz, motional resistance of 3.7-KOmega, and Q as high as 6230 is designed, modeled, and simulated using a two-layers-beam composed of silicon nitride and copper. Intellisuite simulator is used to model the mechanical properties of the new MEMS resonator using a static displacement analysis, and helps to get the optimum values of the beams parameters: the effective spring constant and mass of the resonator were calculated. By calculating the effects due to mechanical non-linearity CCR, we can achieve and demonstrate a resonance frequency of 71 MHz in a polysilicon surface micromachining technology which can be used to build a MEMS filter

Keywords

mechanical properties; micromachining; micromechanical resonators; 3.7 kohm; 71 MHz; Intellisuite simulator; MEMS filter; MEMS resonator; VHF range; beams parameters; clamped-clamped mixed microresonator; mechanical properties; polysilicon surface micromachining technology; resonance frequency; spring constant; static displacement analysis; Analytical models; Copper; Mechanical factors; Micromachining; Micromechanical devices; Resonance; Resonant frequency; Resonator filters; Silicon; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronics, 2006 25th International Conference on

Conference_Location

Belgrade

Print_ISBN

1-4244-0117-8

Type

conf

DOI

10.1109/ICMEL.2006.1650945

Filename

1650945