DocumentCode
2206284
Title
Design and Fabrication of an Extreme Temperature Sensing Optical Probe using Silicon Carbide Technologies
Author
Riza, Nabeel A. ; Sheikh, Mumtaz ; Perez, Frank
fYear
2007
fDate
28-31 Oct. 2007
Firstpage
660
Lastpage
662
Abstract
For the first time, to the best of our knowledge, designed and fabricated is an extreme temperature optical sensor using a single crystal silicon carbide (SiC) optical chip packaged within a sintered SiC hollow tube. The fabricated assembly forms the critical frontend probe of the proposed hybrid wireless-wired optical sensor used for measuring >1000degC temperatures within hot gas chambers such as in coal-fired power generation systems. Initial probe test experiments show the required water-tight chip-end probe sealing and the desired retro-reflected optical interferograms required for temperature-based signal processing.
Keywords
optical sensors; silicon compounds; temperature sensors; wide band gap semiconductors; SiC; silicon carbide technologies; temperature optical sensor; temperature sensing optical probe; temperature-based signal processing; Assembly systems; Optical design; Optical device fabrication; Optical sensors; Optical signal processing; Packaging; Probes; Silicon carbide; Temperature sensors; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2007 IEEE
Conference_Location
Atlanta, GA
ISSN
1930-0395
Print_ISBN
978-1-4244-1261-7
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2007.4388485
Filename
4388485
Link To Document