DocumentCode
2206597
Title
New Methods for Calibrated Scanning Thermal Microscopy (SThM)
Author
Dobson, Phillip S. ; Weaver, John M R ; Mills, Gordon
Author_Institution
Univ. of Glasgow, Glasgow
fYear
2007
fDate
28-31 Oct. 2007
Firstpage
708
Lastpage
711
Abstract
A batch microfabricated scanning thermal microscopy (SThM) probe is presented. The sensor, based on a Pd resistance thermometer is shown to be suitable for calibration and stable for very long periods (> 700 hours). A technique for achieving transformer isolation of the SThM probe is described and shown to be a highly effective route to obtaining calibrated SThM scans of electrically sensitive samples as well as those subject to large bias voltages.
Keywords
calibration; thermometers; Pd resistance thermometer; SThM probe; batch microfabricated scanning thermal microscopy; calibrated scanning thermal microscopy; transformer isolation; Atomic force microscopy; Calibration; Fabrication; Probes; Schottky diodes; Sensor phenomena and characterization; Temperature sensors; Thermal conductivity; Thermal resistance; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2007 IEEE
Conference_Location
Atlanta, GA
ISSN
1930-0395
Print_ISBN
978-1-4244-1261-7
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2007.4388498
Filename
4388498
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