Title :
Investigation of Top/Bottom Electrode and Diffusion Barrier Layer for PZT Thick Film MEMS Sensors
Author :
Pedersen, T. ; Hindrichsen, C.C. ; Thomsen, E.V. ; Hansen, K. ; Lou-Møller, R.
Author_Institution :
Tech. Univ. of Denmark (DTU), Lyngby
Abstract :
In this work screen printed piezoelectric Ferroperm PZ26 lead zirconate titanate (PZT) thick film is used for two MEMS devices. A test structure is used to investigate several aspects regarding bottom and top electrodes. 450 nm ZrO2 thin film is found to be an insufficient diffusion barrier layer for thick film PZT sintered at 850degC. E-beam evaporated Al and Pt is patterned on PZT with a lift-off process with a line width down to 3 mum. The roughness of the PZT is found to have a strong influence on the conductance of the top electrode.
Keywords :
diffusion barriers; lead compounds; micromechanical devices; piezoelectric materials; sintering; thick film sensors; Ferroperm PZ26; MEMS sensors; PZT; ZrO2; diffusion barrier layer; lead zirconate titanate; piezoelectric thick film; screen printed; sintering; size 450 nm; temperature 850 C; thick film sensors; top-bottom electrode; Accelerometers; Electrodes; Microelectromechanical devices; Micromechanical devices; Piezoelectric devices; Piezoelectric materials; Printing; Testing; Thick film sensors; Thick films;
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1261-7
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.4388510
