Advanced MEMS Development for High Power Sensor Application

This paper describes the first attempt to utilize the MEMS in high power sensing application. We present a design and fabrication of advanced MEMS sensors in high power distribution systems. The developed MEMS is used as a high current power sensor for on-ship and autonomous moving vehicles. We designed and fabricated arrays of low power MEMS switches to handle high power which are magnetically actuated. MEMS provides the much needed optimization with its high speed switching capability compared to mechanical current sensors and improved power handling efficiency over solid-state switches.