Title :
One-Side-Electrode-Type Fluid-Based Inclinometer Combined With CMOS Circuitry
Author :
Manaf, Asrulnizam Bin Abd ; Nakamura, Kazumasa ; Onishi, Junpei ; Matsumoto, Yoshinori
Author_Institution :
Keio Univ., Yokohama
Abstract :
In this study, electrical double layer theory is applied to realize one-side-electrode-type fluid-based inclinometer combined with CMOS circuitry. Charge-balanced capacitance-voltage conversion (C-V converter) circuit was designed as detection circuit and it was fabricated using 0.35 mum CMOS process. The sensor design and substrate penetration lithography method are demonstrated in sensor fabrication, and experiment to find a proper fluid for this application was implemented.
Keywords :
CMOS integrated circuits; detector circuits; electrochemical electrodes; electrochemistry; lithography; sensors; C-V converter circuit; CMOS circuitry; charge-balanced capacitance-voltage conversion; electrical double layer theory; one-side-electrode-type fluid-based inclinometer; sensor design; sensor fabrication; substrate penetration lithography; Acceleration; CMOS technology; Capacitance; Capacitance-voltage characteristics; Capacitive sensors; Capacitors; Circuits; Electrodes; Insulation; Permittivity;
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1261-7
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.4388533
