Author_Institution :
Simax Technol., Inc., Irvine, CA, USA
Abstract :
This paper reviews our studies of sol-gel processes for some of ferroelectric thin films, including PZT, PLZT, BaTiO3, LiNbO 3, KNbO3, and Sr0.6Ba0.4Nb 2O6, etc. Different microstructures, such as epitaxial (single crystal-like), polycrystalline, and amorphous films, which depend on the sol-gel processing, were studied. Some interested phenomena including thickness effect, interface effect, ferroelectric-like property of amorphous, second harmonic generation, electro-optical effect, and piezoelectric effect as well as their potential applications are discussed
Keywords :
amorphous state; electro-optical effects; epitaxial layers; ferroelectric thin films; optical harmonic generation; piezoelectricity; sol-gel processing; BaTiO3; KNbO3; LiNbO3; PLZT; PZT; PbLaZrO3TiO3; PbZrO3TiO3; Sr0.6Ba0.4Nb2O6; amorphous films; electro-optical effect; epitaxial films; ferroelectric thin films; piezoelectric effect; polycrystalline films; second harmonic generation; sol-gel processes; thickness; Amorphous materials; Crystal microstructure; Ferroelectric films; Ferroelectric materials; Frequency conversion; Niobium; Piezoelectric effect; Piezoelectric films; Strontium; Transistors;
