Biomimetic Flow-Sensor Arrays Based on the Filiform Hairs on the Cerci of Crickets

In this paper we report on the latest developments in biomimetic flow-sensors based on the flow sensitive mechano-sensors of crickets. Crickets have one form of acoustic sensing evolved in the form of mechano receptive sensory hairs. These filiform hairs are highly perceptive to low-frequency sound with energy sensitivities close to thermal threshold. Arrays of artificial hair sensors have been fabricated using a surface micromachining technology to form suspended silicon nitride membranes and double-layer SU-8 processing to form 1 mm long hairs. Previously, we have shown that these hairs are sensitive to low-frequency sound, using a laser vibrometer setup to detect the movements of the nitride membranes. We have now realized readout electronics to detect the movements capacitively, using electrodes integrated on the membranes.