Title :
Characterization and Noise Analysis of Capacitive MEMS Acoustic Emission Transducers
Author :
Wu, Wei ; Greve, David W. ; Oppenheim, Irving J.
Author_Institution :
Carnegie Mellon Univ., Pittsburgh
Abstract :
Resonant type capacitive MEMS transducers were fabricated using a multi-user MEMS process (MUMPs) for the detection of acoustic emission (AE). Electrical and mechanical characterization of the MEMS transducers has been performed. The performance of the transducers is limited by the noise. In this paper, we present the noise analysis, the discussion of noise sources, and show that Brownian noise plays a significant role in the capacitive MEMS transducers.
Keywords :
acoustic emission testing; acoustic transducers; capacitive sensors; microsensors; noise; Brownian noise; acoustic emission detection; capacitive MEMS acoustic emission transducers; electrical characterization; mechanical characterization; multi-user MEMS process; noise analysis; noise sources; resonant type capacitive MEMS transducers; Acoustic emission; Acoustic noise; Acoustic signal detection; Acoustic transducers; Damping; Electrodes; Micromechanical devices; Resonant frequency; Ultrasonic transducers; Working environment noise;
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1261-7
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.4388611
