DocumentCode
2209234
Title
Characterization and Noise Analysis of Capacitive MEMS Acoustic Emission Transducers
Author
Wu, Wei ; Greve, David W. ; Oppenheim, Irving J.
Author_Institution
Carnegie Mellon Univ., Pittsburgh
fYear
2007
fDate
28-31 Oct. 2007
Firstpage
1152
Lastpage
1155
Abstract
Resonant type capacitive MEMS transducers were fabricated using a multi-user MEMS process (MUMPs) for the detection of acoustic emission (AE). Electrical and mechanical characterization of the MEMS transducers has been performed. The performance of the transducers is limited by the noise. In this paper, we present the noise analysis, the discussion of noise sources, and show that Brownian noise plays a significant role in the capacitive MEMS transducers.
Keywords
acoustic emission testing; acoustic transducers; capacitive sensors; microsensors; noise; Brownian noise; acoustic emission detection; capacitive MEMS acoustic emission transducers; electrical characterization; mechanical characterization; multi-user MEMS process; noise analysis; noise sources; resonant type capacitive MEMS transducers; Acoustic emission; Acoustic noise; Acoustic signal detection; Acoustic transducers; Damping; Electrodes; Micromechanical devices; Resonant frequency; Ultrasonic transducers; Working environment noise;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2007 IEEE
Conference_Location
Atlanta, GA
ISSN
1930-0395
Print_ISBN
978-1-4244-1261-7
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2007.4388611
Filename
4388611
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