Title :
Monitoring the evaporation of femtoliter droplets with CMOS integrated nanomechanical mass sensors
Author :
Arcamone, J. ; Rius, G. ; Pérez-Murano, F. ; Dujardin, E. ; Ondarçuhu, T.
Author_Institution :
CSIC, Bellaterra
Abstract :
We present a time-resolved study of the evaporation in air of minuscule sessile droplets deposited by nanodispensing techniques. Nanomechanical resonators are used to determine the time evolution of the mass of liquid droplets with high precision. We have studied the evaporation of droplets with diameters in the one micron range, which corresponds to volumes in the femtoliter range, nine orders of magnitude smaller than previously published data.
Keywords :
CMOS integrated circuits; evaporation; liquid-vapour transformations; mass measurement; micromechanical resonators; microsensors; nanotechnology; CMOS integrated nanomechanical mass sensors; evaporation monitoring; femtoliter droplets; minuscule sessile droplets; nanodispensing techniques; nanomechanical resonators; time evolution; time-resolved study; CMOS image sensors; Calibration; Circuits; Monitoring; Nanoscale devices; Optical resonators; Optical sensors; Resonance; Resonant frequency; Sensor phenomena and characterization;
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1261-7
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.4388613
