Application of sliding mode control to electrostatically actuated two-axis gimbaled micromirrors

Author

Sane, Harshad S. ; Yazdi, Navid ; Mastrangelo, Carlos H.

Author_Institution

Corning-Intellisense Inc., Wilmington, MA, USA

Volume

5

fYear

2003

fDate

4-6 June 2003

Firstpage

3726

Abstract

In this paper, we demonstrate the application of sliding mode control to a two-axis gimbaled MEMS. The micromirror is a two-axis gimbaled system electrostatically actuated by two pairs of electrodes for each axis. The paper presents a 2-dof coupled dynamic model of a micromirror. The model parameters such as the resonance frequencies, torques and damping are found numerically and verified experimentally. A sliding mode control algorithm with a first-order sliding function is used for implementation. It is shown that the sliding mode control yields a fast and robust switching performance over a range of system parameters in simulation as well as experimentation.

Keywords

damping; electrostatic actuators; micromirrors; torque; variable structure systems; 2-dof coupled dynamic model; MEMS micromirror; damping; electrodes; electrostatically actuated two-axis gimbaled micromirrors; first-order sliding function; resonance frequency; sliding mode control; system parameter; torque; Communication switching; Electrodes; Micromechanical devices; Micromirrors; Mirrors; Optical crosstalk; Optical sensors; Optical switches; Robust control; Sliding mode control;

fLanguage

English

Publisher

ieee

Conference_Titel

American Control Conference, 2003. Proceedings of the 2003

ISSN

0743-1619

Print_ISBN

0-7803-7896-2

Type

conf

DOI

10.1109/ACC.2003.1240414

Filename

1240414