DocumentCode :
2210355
Title :
Non-linear effects in ICP: theory and experiments
Author :
Smolyakov, A.I. ; Godyak, V.A. ; Tyshetskiy, Yu.O.
Author_Institution :
Dept. of Phys. & Eng., Saskatchewan Univ., Saskatoon, Sask., Canada
fYear :
2002
fDate :
26-30 May 2002
Firstpage :
241
Abstract :
Summary form only given. Operation of a low pressure inductively coupled plasma (ICP) at low driving frequency leads to increased values of the RF magnetic field and thus to enhancement of nonlinear effects due to RF Lorentz force typically negligible at 13.56 MHz. In recent years ICP experiments in low frequency regime have demonstrated generation of strong upper harmonics of the electrostatic potential and electric current in the ICP skin layer. A significant modification of the plasma profile by ponderomotive force has been demonstrated in a low frequency ICP, but the ponderomotive force found in experiment appeared to be significantly smaller than that predicted by classical formula for cold plasma. We review recently obtained experimental results on nonlinear effects in a low frequency cylindrical ICP with a planar coil and present a theory of these phenomena. We show that generation of nonlinear harmonics in RF potential and RF current are due to action of different parts of the RF Lorentz force; its potential part gives rise to potential oscillations, while its solenoidal part (existing only in a dissipative plasma) is responsible for generation of nonlinear current. A generalized theoretical model for nonlinear effects in two-dimensional cylindrical ICP, accounting for potential and solenoidal parts of the RF Lorentz force, has been formulated within a magneto-hydrodynamic approach.
Keywords :
plasma kinetic theory; plasma magnetohydrodynamics; plasma nonlinear processes; plasma oscillations; plasma transport processes; skin effect; ICP; ICP skin layer; RF Lorentz force; RF current; RF magnetic field; RF potential; anomalous skin effect; classical expression; classical formula; cold plasma; dissipative plasma; driving frequency; electric current; electron thermal motion; electrostatic potential; experimental results; experiments; hydrodynamic approach; kinetics approach; low frequency ICP; low frequency cylindrical ICP; low frequency regime; low pressure inductively coupled plasma; magneto-hydrodynamic approach; nonlinear current; nonlinear effects; nonlocal regime; planar coil; plasma profile; plasma profile modification; ponderomotive force; ponderomotive forces; potential oscillations; review; solenoidal part; strong upper harmonics; theory; two-dimensional cylindrical ICP; Coils; Couplings; Current; Electric potential; Electrostatics; Lorentz covariance; Magnetohydrodynamic power generation; Plasmas; Radio frequency; Skin;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 2002. ICOPS 2002. IEEE Conference Record - Abstracts. The 29th IEEE International Conference on
Conference_Location :
Banff, Alberta, Canada
Print_ISBN :
0-7803-7407-X
Type :
conf
DOI :
10.1109/PLASMA.2002.1030506
Filename :
1030506
Link To Document :
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