Title :
Considerations on oxide reliability QC
Author_Institution :
Device Development Center, Hitachi, Ltd.
Keywords :
Acceleration; Dielectric breakdown; Dielectric measurements; Failure analysis; Laboratories; Power engineering and energy; Quality assurance; Reliability engineering; Semiconductor device modeling; Weibull distribution;
Conference_Titel :
Integrated Reliability Workshop Final Report, 1993 International
DOI :
10.1109/IRWS.1993.666292