Title :
Design of dual-axis accelerometer with CMOS-MEMS
Author :
Kuo, Tsung-Chi ; Kiang, Jean-Fu
Author_Institution :
Grad. Inst. of Commun. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
A dual-axis accelerometer with chopper-stabilized circuit is designed and implemented using the TSMC 0.18 μm 1P6M CMOS process. The acceleration of a proof mass is detected by measuring the capacitance change of the capacitor bank linked to mass via springs.
Keywords :
CMOS integrated circuits; accelerometers; capacitance measurement; choppers (circuits); CMOS-MEMS; capacitance change measurement; capacitor bank; chopper-stabilized circuit; dual-axis accelerometer; Acceleration; Accelerometers; CMOS process; Capacitance; Capacitors; Electrodes; Sensors;
Conference_Titel :
Applications of Electromagnetism and Student Innovation Competition Awards (AEM2C), 2010 International Conference on
Conference_Location :
Taipei
Print_ISBN :
978-1-4244-6416-6
DOI :
10.1109/AEM2C.2010.5578760
