• DocumentCode
    2210555
  • Title

    Design of dual-axis accelerometer with CMOS-MEMS

  • Author

    Kuo, Tsung-Chi ; Kiang, Jean-Fu

  • Author_Institution
    Grad. Inst. of Commun. Eng., Nat. Taiwan Univ., Taipei, Taiwan
  • fYear
    2010
  • fDate
    11-13 Aug. 2010
  • Firstpage
    89
  • Lastpage
    92
  • Abstract
    A dual-axis accelerometer with chopper-stabilized circuit is designed and implemented using the TSMC 0.18 μm 1P6M CMOS process. The acceleration of a proof mass is detected by measuring the capacitance change of the capacitor bank linked to mass via springs.
  • Keywords
    CMOS integrated circuits; accelerometers; capacitance measurement; choppers (circuits); CMOS-MEMS; capacitance change measurement; capacitor bank; chopper-stabilized circuit; dual-axis accelerometer; Acceleration; Accelerometers; CMOS process; Capacitance; Capacitors; Electrodes; Sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Electromagnetism and Student Innovation Competition Awards (AEM2C), 2010 International Conference on
  • Conference_Location
    Taipei
  • Print_ISBN
    978-1-4244-6416-6
  • Type

    conf

  • DOI
    10.1109/AEM2C.2010.5578760
  • Filename
    5578760
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2210555