Design and Testing of Single and Double Sided Cantilevers for Chemical Sensing

Author

Choudhury, A. ; Hesketh, P.J. ; Thundat, T.G. ; Zhiyu Hu ; Vujanic, R.

Author_Institution

Georgia Inst. of Technol., Atlanta

fYear

2007

fDate

28-31 Oct. 2007

Firstpage

1432

Lastpage

1435

Abstract

Two approaches to surface stress-based chemical sensing with piezoresistive microcantilevers are compared. Microcantilever-based chemical sensing is usually performed by functionalizing a single surface of the cantilever (single-sided surface stress-SSS). Sensitive measurements can be made by functionalization of both surfaces of the cantilever (double-sided surface stress-DSS). Design issues related to the sensitivity of these measurement principles are discussed. Also, a low noise method of measuring cantilever resistance is used for evaluation of surface stress response.

Keywords

cantilevers; chemical sensors; micromechanical devices; cantilever resistance measurement; chemical sensing; double sided cantilevers; double-sided surface stress; low noise method; piezoresistive microcantilevers; single sided cantilevers; single-sided surface stress; Acoustic sensors; Chemical sensors; Decision support systems; Electrical resistance measurement; Optical surface waves; Piezoresistance; Stress measurement; Surface acoustic waves; Surface resistance; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2007 IEEE

Conference_Location

Atlanta, GA

ISSN

1930-0395

Print_ISBN

978-1-4244-1261-7

Type

conf

DOI

10.1109/ICSENS.2007.4388682

Filename

4388682