A novel semi-analytical solution of impedance of grid-type power distribution network

In this paper, a semi-analytical method is proposed to accurately and efficiently calculate the impedance of grid-type power distribution network (PDN) on interposer. An equivalent plane PDN is constructed to obtain the same impedance curve as that of grid-type PDN. Furthermore, a modified resonant cavity mode is applied for the equivalent plane PDN to eliminate the deviation between the equivalent plane PDN and grid-type PDN, and to obtain the consistent impedance curves as that of 3-D full-wave simulation for the grid-type PDN. The accuracy and efficiency of the proposed method are verified by the 3-D full-wave simulation method and an available measurement result. Finally, different sizes of grid-type PDN are investigated to verify the scalability of the proposed semi-analytical method.