3-D silicon technology for nano-electronics

As the incumbent planar silicon technologies enter into deep nano scale dimension, it reveals many issues which are believed to be very difficult to be solved within incumbent technologies. Many exotic technologies seem to be not ready to take over the silicon technology. Thus the 3-D silicon technology is the only solution and fortunately in 3-D silicon technology the knowledge and experiences learned from 2-D planar technology over the 30 years can be fully utilized so that 3-D technology will be quickly established. Furthermore, when 3-D silicon technology facilitates with new materials and new concepts, 3-D silicon technology will be the center of technology in merging NT, BT, IT and others.