Title :
Rapid fabrication of functional CNT sensor arrays using micro-spotting and DEP technologies
Author :
Li, Wen J. ; Xi, Ning
Author_Institution :
Centre for Micro & Nano Syst., Chinese Univ. of Hong Kong, Kowloon
Abstract :
Our team has developed a systematic process to rapidly construct Carbon Nanotube (CNT) sensors by combining DEP and micro-robotics technologies. Arrays of CNT sensors were fabricated on MUMPs chips using this systematic process and the CNT sensor characteristics were found to be very consistent with individual CNT sensors fabricated using basic manual DEP manipulation process. We have shown that the average time to fabricate CNT sensor using this process is ~1 sec, which means that potentially 100,000 CNT components could be built in 24 hours .
Keywords :
MUMPS; carbon nanotubes; microrobots; nanotechnology; rapid prototyping (industrial); sensor arrays; DEP technologies; MUMPs chips; carbon nanotube sensors; functional CNT sensor arrays; micro-robotics technologies; micro-spotting; rapid fabrication; Carbon nanotubes; Chemical elements; Chemical sensors; Circuits; Fabrication; Nanobioscience; Sensor arrays; Sensor phenomena and characterization; Sensor systems; Thermal sensors; CNT Sensors; DEP Manipulation; Micro-robotics; Nano-sensor Arrays;
Conference_Titel :
Nanotechnology Materials and Devices Conference, 2006. NMDC 2006. IEEE
Conference_Location :
Gyeongju
Print_ISBN :
978-1-4244-0540-4
Electronic_ISBN :
978-1-4244-0541-1
DOI :
10.1109/NMDC.2006.4388707
