Carbon coating by double discharge pulsed electron beam generator

Summary form only given, as follows. Double discharge pulsed electron beam generator (DDPEBG), a method to generate intense electron beams by superposing two discharges namely low pressure dc glow discharge and a high current pulsed discharge has been used for carbon coating. The characteristics of the electron beam generated as a result of this technique are its small diameter, high peak current and short pulse length. In a previous work by the same authors, it is shown that this electron beam device is used for micro drilling of metals. It is also possible that the device might be useful in many applications such as micro-processing, X-rays generation, high-power laser pre-ionization, and others. In this current work, we will be presenting results of deposition of carbon on a substrate as an attempt to deposit carbon nano-tubes using this device. The methods used to get thin carbon films (nano tubes) are by electron beam irradiation of graphite, and by using methane plasma in the presence electron beam.