Generation of hyperthermal neutral beam for the material processing

Summary form only given, as follows. Hyperthermal neutrals with energy levels between 2 eV and 100 eV can be utilized for a diagnostic tool for the boundary region of fusion plasmas, for the space environment on Earth orbiting spacecraft, and for a surface modification and material´s processing. DEGAS 2, Monte-Carlo neutral transport code, follows the trajectory of each neutral in the pancake-style ICP source, in which the reflective neutrals are generated. The code, the plasma density at the reflector, and power coupling optimize the height of the ICP source to maximize the neutral flux out of the ICP source. Using DEGAS 2 code we can calculate the flux and energy distribution of the hyperthermal beam at interesting positions. The measurement of particle energy distribution using NPA (neutral particle analyzer) will be discussed. Also, Langmuir probe measurement in the slim plasma source and the removal of a PR (photo resistor) on silicon wafer as the evidence of extracting hyperthermal neutral beam out of the plasma source will be presented.