Non-thermal properties in low pressure spraying plasma

Summary form only given. Non-thermal properties of low pressure spraying plasma have been characterized by optical emission spectroscopy and electric probes installed in a fast scanning probe system. Two-temperature model of electron is introduced to explain the nonisothermal properties of electrons, which are measured by electric probes. Excitation temperatures of atomic and ionic lines are calculated from the measurement of emission intensities of Ar (I) and Ar (II), and they explain local thermodynamic equilibrium (LTE) or the nonlocal thermodynamic equilibrium (non-LTE) model. In order to deduce more reasonable values (excitation temperatures), multi thermodynamic equilibrium (MTE) model is introduced, which gives different temperatures depending upon the atomic excitation states.