DocumentCode
2211849
Title
The Use of Statistical Methods to Insure the Quality and Optimization of Polysilicon Deposition
Author
Aceves-Mijares, Mariano ; Murphy-Arteaga, Roberto ; Torres-Jacome, Alfonso ; Calleja-Arriaga, Wilfrido
Author_Institution
Instituto Nacional De Astrofisica, Optica Y Electronica
fYear
1993
fDate
24-27 Oct 1993
Firstpage
105
Lastpage
112
Keywords
Analysis of variance; Chemicals; Extraterrestrial measurements; Fabrication; Optimization methods; Rotation measurement; Statistical analysis; Temperature; Thickness control; Thickness measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Integrated Reliability Workshop Final Report, 1993 International
Type
conf
DOI
10.1109/IRWS.1993.666298
Filename
666298
Link To Document