Title :
Reliability Overview of RF MEMS Devices and Circuits
Author :
Melle, S. ; Flourens, F. ; Dubuc, D. ; Grenier, K. ; Pons, P. ; Pressecq, F. ; Kuchenbecker, J. ; Muraro, J.L. ; Bary, L. ; Plana, R.
Author_Institution :
LAAS-CNRS 7 avenue du Colonel Roche, 31077 Toulouse, France
Abstract :
This paper outlines the reliability properties of RF MEMS devices and circuits. The tools used to evaluate the reliability properties are presented. Results are shown on both moveable and non moveable devices. Key parametrers that drive the reliability are pointed out : stress, roughness, temperature dependance, dielectric properties. Finally, it is presented some solutions to improve the reliability performance of these devices in term of technology and design.
Keywords :
Aerospace industry; Circuits; Filters; Packaging; Phase shifters; Radiofrequency microelectromechanical systems; Space technology; Switches; Varactors; Wireless communication;
Conference_Titel :
Microwave Conference, 2003 33rd European
Conference_Location :
Munich, Germany
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMA.2003.340820
