Title :
Analysis and modeling of resistive probes
Author :
Wan Kim, Sang ; Young Choi, Woo ; Young Song, Jae ; Pil Kim, Jong ; Kim, Junsoo ; Ko, Hyoungsoo ; Park, Hongsik ; Park, Chulmin ; Hong, Seungbum ; Choa, Sung-Hoon ; Duk Lee, Jong ; Shin, Hyungcheol ; Park, Byung-Gook
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., Seoul
Abstract :
A simple model of the resistive probe was proposed for the first time to enhance its sensitivity. The model classifies output current into three components: sensing current, unmodulated current, and punch-through current. Based on it, the electrical performance of the resistive probe was analyzed. The proposed model is expected to contribute to improvement of the sensing performance of the resistive probe.
Keywords :
electrical resistivity; ferroelectric devices; probes; punch-through current; resistive probes; sensing current; sensitivity enhancement; unmodulated current; Computer science; Electrons; Ferroelectric materials; Microscopy; Performance analysis; Probes; Silicon; Surface resistance; Temperature sensors; Voltage; analysis; modeling; resistive probe; sensitivity;
Conference_Titel :
Nanotechnology Materials and Devices Conference, 2006. NMDC 2006. IEEE
Conference_Location :
Gyeongju
Print_ISBN :
978-1-4244-0540-4
Electronic_ISBN :
978-1-4244-0541-1
DOI :
10.1109/NMDC.2006.4388746
