DocumentCode :
2212329
Title :
Characterization of Wafer Charging Mechanisms and Oxide Survival Prediction Methodology
Author :
Lukaszek, W. ; Dixon, Warren
Author_Institution :
Stanford University
fYear :
1993
fDate :
24-27 Oct 1993
Firstpage :
117
Lastpage :
123
Keywords :
Charge measurement; Current measurement; EPROM; Ion implantation; Monitoring; Performance evaluation; Sensor phenomena and characterization; Sensor systems; Surface charging; Voltmeters;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Integrated Reliability Workshop Final Report, 1993 International
Type :
conf
DOI :
10.1109/IRWS.1993.666300
Filename :
666300
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2212329
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