DocumentCode
2212644
Title
Plasma assisted deposition technique for synthesis of low dielectric constant polyanisidine thin films
Author
Mathai, Cherian J. ; Saravanan, S. ; Jayalekshmi, S. ; Anantharaman, M.R. ; Venkatachalam, S. ; Prabhakaran, P.V.
Author_Institution
Dept. of Phys., Cochin Univ. of Sci. & Technol., India
fYear
2002
fDate
26-30 May 2002
Firstpage
292
Abstract
Summary form only given. We report the preparation of low dielectric polyanisidine thin films by employing ac plasma polymerization technique. FTIR studies revealed that the aromatic ring is retained in the polymer films. This will enhance the thermal stability of the films. Dielectric permittivity and dielectric loss of these films were measured by a HP4192A impedance analyzer in the frequency range of 100 Hz to 1 MHz. These films sandwich between two metal electrodes were subjected to dielectric studies in a home built conductivity cell in the temperature range of 300 K to 343 K. Dielectric constant of these films lie in the range of 2.22 to 2.37 for the entire temperature and frequency range scanned. Initial studies indicate that these materials are potential candidates where low dielectric constant is one of the criterion.
Keywords
Fourier transform spectra; dielectric losses; infrared spectra; permittivity; plasma deposition; plasma diagnostics; plasma dielectric properties; polymer films; 100 Hz to 1 MHz; 300 to 343 K; FTIR studies; HP4192A impedance analyzer; chemical inertness; dielectric constant; dielectric loss; dielectric permittivity; low dielectric constant polyanisidine thin films synthesis; plasma assisted deposition technique; plasma assisted methods; plasma polymerization; thermal instability; thermal stability; Conductive films; Dielectric constant; Dielectric loss measurement; Dielectric losses; Dielectric thin films; Frequency; Plasma measurements; Plasma temperature; Polymer films; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2002. ICOPS 2002. IEEE Conference Record - Abstracts. The 29th IEEE International Conference on
Conference_Location
Banff, Alberta, Canada
Print_ISBN
0-7803-7407-X
Type
conf
DOI
10.1109/PLASMA.2002.1030599
Filename
1030599
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