Title :
Feedback Amplifier based on an Embedded HEMT in Thin-film Multilayer MCM-D Technology
Author :
Vandersmissen, Raf ; Schreurs, Dominique ; Carchon, Geert ; Borghs, Gustaaf
Author_Institution :
IMEC, MCP, Kapeldreef 75, B-3001 Leuven, BELGIUM, +32-16-288056, raf.vandersmissen@imec.be
Abstract :
In this paper a feedback amplifier circuit integrated in MCM-D (MultiChip Module with Deposited thin films) on glass technology is presented. The active device of the amplifier is a thin-film Ge (germanium) -based HEMT. The HEMT is embedded in the bottom dielectric layer of the MCM-D. The combination of passive MCM-D technology and HEMTs on Ge allows for efficient semimonolithic integration of active devices and realization of MCMs with embedded passive and active components for amplifier circuits.
Keywords :
Dielectric thin films; Feedback amplifiers; Feedback circuits; HEMTs; Integrated circuit technology; Multichip modules; Nonhomogeneous media; Sputtering; Thin film circuits; Transistors;
Conference_Titel :
Microwave Conference, 2003 33rd European
Conference_Location :
Munich, Germany
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMA.2003.340949
