The model of interaction charged particle and plasma fluxes with metallic detail surface under the combined processing

A model of charged particles and plasma fluxes interacting with a metallic surface is presented. All the processes are taken into the heat balance in an elementary volume and in the boundary conditions. In can be readily seen that for all the energies at current densities below j1 the erosion coefficient remains constant, and in the range of j1 to j2 it increases with the increase of current density. It was found that the particle flux duration and the kind of ions effect the erosion coefficient