DocumentCode :
2214327
Title :
Random network transistors of carbon nanotubes directly grown on glass substrate
Author :
Bae, Eun Ju ; Min, Yo-Sep ; Kim, Un Jeong ; Park, Wanjun
Author_Institution :
Mater. & Dev. Res. Center, Samsung Adv.Inst. of Technol., Kyeongki
Volume :
1
fYear :
2006
fDate :
22-25 Oct. 2006
Firstpage :
482
Lastpage :
483
Abstract :
We report a transistor of randomly networked single-walled carbon nanotubes (SWNTs) grown on glass by using water plasma CVD. The density of the nanotube on pre-patterned region was more than 50/ mum2 which is much larger than the percolation threshold. The nanotube network transistors were fabricated with Al2O3 for the gate oxide and a conducting and transparent ZnO for the back-gate. These nanotube active devices may be fitted to thin film transistor applications for future opto-electronics.
Keywords :
carbon nanotubes; glass structure; plasma CVD; thin film transistors; SWNT; chemical vapour deposition; gate oxide; glass substrate; random network transistor; single-walled carbon nanotube; thin film transistor application; water plasma CVD; Aluminum oxide; Carbon nanotubes; Glass; Nanoscale devices; Plasma applications; Plasma devices; Plasma temperature; Substrates; Thin film transistors; Zinc oxide; Conducting ZnO fims; Glass substrate; SWNT; Thin Film Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology Materials and Devices Conference, 2006. NMDC 2006. IEEE
Conference_Location :
Gyeongju
Print_ISBN :
978-1-4244-0540-4
Electronic_ISBN :
978-1-4244-0541-1
Type :
conf
DOI :
10.1109/NMDC.2006.4388827
Filename :
4388827
Link To Document :
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