Title :
Generation and characterization of copper nanowires, nanoparticles, and thin films by flow- limited field-injection electrostatic spraying
Author :
Heil, P. ; Wenhua Gu ; Sangho Lim ; Hyungsoo Choi ; Kyekyoon Kim
Author_Institution :
Univ. of Illinois & Urbana-Champaign, Champaign
Abstract :
Nanoscale structures of copper including nanowires, nanoparticles, and thin films were produced using flow-limited field-injection electrostatic spraying (FFESS) combined with chemical vapor deposition (CVD). The FFESS system allowed for efficient vaporization and delivery of the CVD precursor. The system also allowed for control of the type of structures based on deposition parameters. X-ray photoelectron spectroscopy (XPS) data confirmed that the samples were pure copper.
Keywords :
X-ray photoelectron spectra; chemical vapour deposition; copper; metallic thin films; nanoparticles; nanowires; spraying; vaporisation; CVD; Cu; Cu - Element; FFESS system; X-ray photoelectron spectroscopy; XPS; chemical vapor deposition; copper nanowires; flow-limited field-injection electrostatic spraying; nanoparticles; nanoscale structures; thin films; vaporization; Character generation; Chemical vapor deposition; Copper; Electrostatics; Nanoparticles; Nanostructures; Nanowires; Spraying; Sputtering; Transistors; FFESS; copper nanoparticles; copper nanowires; copper thin film; nanoparticle synthesis;
Conference_Titel :
Nanotechnology Materials and Devices Conference, 2006. NMDC 2006. IEEE
Conference_Location :
Gyeongju
Print_ISBN :
978-1-4244-0540-4
DOI :
10.1109/NMDC.2006.4388828
