Title :
Measurement of the sheet resistance of thin metallic films at 130GHz
Author :
Lee, M-H J. ; Collier, R.J.
Author_Institution :
Microelectronics Research Centre, Cavendish Laboratory, Madingley Road, Cambridge, CB3 OHE, UK. Tel: +44 (0)1223 337493, Electronic mail: mhjl2@hermes.cam.ac.uk
Abstract :
The sheet resistance of thin metallic films has been measured using a transmission technique at 130 GHz. This technique can be used for a range of sheet resistances from a few kilohms down to a few ohms. The microwave results are higher than the corresponding values measured at 0 Hz. For sheet resistances less than a few ohms, the measurement range has been extended downwards using patterned metallic films.
Keywords :
Conductive films; Conductivity; Dielectric measurements; Dielectric substrates; Dielectric thin films; Electrical resistance measurement; Equations; Frequency measurement; Microwave measurements; Microwave theory and techniques;
Conference_Titel :
Microwave Conference, 2003 33rd European
Conference_Location :
Munich, Germany
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMA.2003.340992
