Title :
Microwave Characterization of Thin Ferroelectric Films
Author :
Deleniv, A. ; Abadei, S. ; Gevorgian, S.
Author_Institution :
Chalmers University of Technology, Department Microtechnology and Nanoscience MC-2, Fysikgrÿnd 3, 41296 Göteborg, Sweden, Phone: +46-(0)31 772 36 05
Abstract :
A simple technique for characterization of dielectrics at high microwave frequencies is proposed and verified experimentally. The technique makes use of the measured impedance of a test structure. The latter is a simple capacitor, formed on the top of a substrate with an arbitrary number of dielectric/conductor layers and contains a material under test (MUT) layer with unknown loss tangent and dielectric constant. Assuming that all other layers are specified, a simple method is given to calculate RF impedance of such a structure enabling extraction of MUT properties
Keywords :
Capacitors; Conducting materials; Dielectric losses; Dielectric materials; Dielectric measurements; Dielectric substrates; Ferroelectric films; Impedance measurement; Microwave frequencies; Testing;
Conference_Titel :
Microwave Conference, 2003 33rd European
Conference_Location :
Munich, Germany
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMA.2003.340995
