Title :
An angular rate sensor interface IC
Author :
Zarabadi, Seyed R. ; Castillo-Borelly, Pedro E. ; Johnson, Jack D.
Author_Institution :
Delco Electron. Corp., Kokomo, IN, USA
Abstract :
This paper describes an interface IC that maintains the vibration of a surface micro-machined yaw rate sensor and processes its angular rate signal. In addition, it provides the necessary electronics to compensate for the nonuniformities, parameter shifts with temperature, and offset and sensitivity variations of the sensor. The IC has been fabricated in a 1.2 μm CMOS process that includes a high voltage MOS transistor. Experimental results of several key circuit blocks and the angular rate sensor system indicate proper operation over temperature and supply voltage
Keywords :
CMOS integrated circuits; angular measurement; microsensors; 1.2 micron; CMOS process; angular rate sensor; compensation; high voltage MOS transistor; interface IC; surface micromachined device; vibration; yaw; Bandwidth; CMOS process; Integrated circuit noise; Sensor phenomena and characterization; Sensor systems; Temperature distribution; Temperature sensors; Turning; Vehicle driving; Voltage;
Conference_Titel :
Custom Integrated Circuits Conference, 1996., Proceedings of the IEEE 1996
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-3117-6
DOI :
10.1109/CICC.1996.510565
