Substrates influence on the structure and static electromagnetic properties of FeCoB-SiO2 thin films

Author

Zhang, L. ; Zhu, Z.W. ; Deng, L.J.

Author_Institution

Eng. Res. Center of Electromagn. Wave Absorbing Mater., Univ. of Electron. Sci. & Technol. of China, Chengdu, China

fYear

2009

fDate

25-27 Sept. 2009

Firstpage

353

Lastpage

355

Abstract

The microstructure and electromagnetic properties of FeCoB-SiO₂ thin films which were deposited on different substrates (silicon, glass and Mylar) by using magnetron sputtering were studied. X-Ray Diffraction revealed that FeCo nanocrystalline only precipitated in FeCoB-SiO₂ thin films on silicon and glass substrates, and the FeCoB-SiO₂ films on Mylar substrate were amorphous. The surface images obtained by atomic microscopy (AFM) indicated that films on Mylar substrate with biggest particle size (about 120-150 nm), and agglomerated particle was discovered. The static electromagnetic properties, including resistivity and saturation magnetization for the films on different substrates, had also been investigated. The films sputtered on glass showed highest resistivity (2140 muOmega.cm) and a biggest saturation magnetization (4 pi Ms = 13 kG).

Keywords

X-ray diffraction; atomic force microscopy; boron alloys; cobalt alloys; electrical resistivity; elemental semiconductors; ferromagnetic materials; glass; iron alloys; magnetic thin films; magnetisation; nanostructured materials; particle size; silicon; silicon compounds; sputter deposition; AFM; FeCoB-SiO₂; Mylar substrate; Si; X-Ray Diffraction; atomic force microscopy; electromagnetic properties; glass substrates; magnetization; magnetron sputtering; microstructure; nanocrystalline materials; particle size; resistivity; resistivity 2140 muohmcm; thin films; Amorphous magnetic materials; Conductivity; Glass; Magnetic properties; Microstructure; Saturation magnetization; Semiconductor thin films; Silicon; Sputtering; X-ray imaging; Mylar substrate; amorphous; resistivity; static electromagnetic properties;

fLanguage

English

Publisher

ieee

Conference_Titel

Applied Superconductivity and Electromagnetic Devices, 2009. ASEMD 2009. International Conference on

Conference_Location

Chengdu

Print_ISBN

978-1-4244-3686-6

Electronic_ISBN

978-1-4244-3687-3

Type

conf

DOI

10.1109/ASEMD.2009.5306621

Filename

5306621