Title :
Metal nanotube membranes and their lithographic applications
Author :
Lee, Woo ; Fan, Hong Jin ; Alexe, Marin ; Scholz, Roland ; Zacharias, Margit ; Nielsch, Kornelius ; Gösele, Ulrich
Author_Institution :
Max Planck Inst. of Micro-structure Phys., Halle
Abstract :
A simple fabrication method for well-defined Au nanotube membranes has been developed. The resulting nanotube membranes were successfully used for generating wafer-scale periodic arrays of various functional nanostructures.
Keywords :
nanoelectronics; nanolithography; nanotube devices; periodic structures; fabrication method; functional nanostructures; lithography; metal nanotube membranes; wafer-scale periodic arrays; Biomembranes; Fabrication; Gold; Nanoscale devices; Nanostructures; Sensor arrays; Shape control; Size control; Sputtering; Surface morphology; ZnO nanowires; anodic aluminum oxide (AAO); ferroelectric nanodots; metal nanotubes; shadow mask;
Conference_Titel :
Nanotechnology Materials and Devices Conference, 2006. NMDC 2006. IEEE
Conference_Location :
Gyeongju
Print_ISBN :
978-1-4244-0541-1
Electronic_ISBN :
978-1-4244-0541-1
DOI :
10.1109/NMDC.2006.4388876
