Title :
RF MEMS Switches Based on the Buckle-beam Thermal Actuator
Author :
Girbau, D. ; Lázaro, A. ; Pradell, L.
Author_Institution :
Universitat Politÿcnica de Catalunya (UPC), Dept. TSC, Campus Nord UPC - Mòdul D3, 08034 Barcelona - Spain, tel: + 34-93- 4016834, fax: + 34-93- 4017232
Abstract :
In this paper, we propose series and parallel RF MEMS-switch configurations based on the buckle-beam thermal actuator. We demonstrate the feasibility of using this actuator in RF applications with processes and materials of standard microelectronics technology. The designed switches achieve simulated on-state insertion loss of 0.09 dB and off-state isolation of -19 dB @ 2 GHz. To ease the computation of the actuator displacement, we present a simple analytical model which is validated through the results obtained from simulations in CoventorWare¿ and Sugar softwares.
Keywords :
Actuators; Analytical models; Computational modeling; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Thermal conductivity; Thermal resistance; Voltage;
Conference_Titel :
Microwave Conference, 2003 33rd European
Conference_Location :
Munich, Germany
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMA.2003.341037
