Title :
A Micromachined Tunable Cavity Resonator
Author :
Mercier, D. ; Chatras, M. ; Orlianges, J.C. ; Champeaux, C. ; Catherinot, A. ; Blondy, P. ; Cros, D. ; Papapolymerou, J.
Author_Institution :
IRCOM, Limoges cedex, 123 av. Albert Thomas 87060, France.
Abstract :
This paper focuses on a tunable resonator fabricated using bulk and surface micro-machining techniques. The resonator consists of a silicon micro-machined metalized cavity coupled with a MEMS bridge capacitor for tunability purposes. The resonator is excited using coplanar waveguide lines to avoid losses from transitions and facilitate measurements. The unloaded quality factor of the device is about 150 depending on the MEMS varactor position and the simulated tuning range is 0.4 GHz (1.45%) at 27.8 GHz.
Keywords :
Bridge circuits; Capacitors; Cavity resonators; Coplanar waveguides; Loss measurement; Micromechanical devices; Q factor; Silicon; Varactors; Waveguide transitions;
Conference_Titel :
Microwave Conference, 2003 33rd European
Conference_Location :
Munich, Germany
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMA.2003.341043
