Title :
Increase in the luminescence efficiency of R·G·B LED via the controlling texture of AZO thin films
Author :
Kim, Kyeong-Min ; Jin, Eun-Mi ; KIM, Yong-Kab
Abstract :
Transparent conducting AZO thin films were prepared by RF magnetron sputtering system with glass substrate (corning 1737) and annealed during 2 hr at 400degC in vacuum ambient and 600degC in oxygen ambient, respectively. The smooth AZO films were etched in diluted HCL (0.5%) to check the surface properties with the ambient post-annealing process. Using the methods of SEM and Spectro-radiometer, we analyzed the optical properties of the textured AZO thin films. We confirmed that the vacuum ambient post-annealing process is effective method for increasing the efficiency of long wavelength LED. The oxygen ambient post-annealing process is suitable method for increasing the efficiency of short wavelength LED. We presumed that the ambient post-annealing process can control textured surface of AZO thin films for increasing the efficiency of LED.
Keywords :
aluminium; annealing; conducting materials; light emitting diodes; luminescence; scanning electron microscopy; sputter etching; thin films; zinc compounds; AZO thin films; RF magnetron sputtering system; RGB LED; SEM; ZnO:Al - System; glass substrate; luminescence efficiency; optical properties; spectro-radiometer; surface properties; temperature 400 C; temperature 600 C; time 2 hr; transparent conducting thin films; vacuum ambient post-annealing process; Annealing; Glass; Light emitting diodes; Luminescence; Optical films; Optical surface waves; Radio frequency; Sputtering; Transistors; Vacuum systems; AZO; ambient postannealing process; control of textured structure; efficiency of LED;
Conference_Titel :
Nanotechnology Materials and Devices Conference, 2006. NMDC 2006. IEEE
Conference_Location :
Gyeongju
Print_ISBN :
978-1-4244-0541-1
Electronic_ISBN :
978-1-4244-0541-1
DOI :
10.1109/NMDC.2006.4388892
