• DocumentCode
    2215918
  • Title

    Development of an active membrane probe card

  • Author

    Leung, Justin ; Wang, S.S.

  • Author_Institution
    Stanford University
  • fYear
    1993
  • fDate
    24-27 Oct 1993
  • Firstpage
    206
  • Lastpage
    208
  • Keywords
    Biomembranes; Circuit testing; Contact resistance; Current density; Electric breakdown; Integrated circuit testing; Metallization; Polyimides; Probes; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Integrated Reliability Workshop Final Report, 1993 International
  • Type

    conf

  • DOI
    10.1109/IRWS.1993.666315
  • Filename
    666315
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2215918