Title :
A compact serial RF MEMS switch for S-band application
Author :
Xiaodong, Hu ; Lumiao ; Maohui, Hou ; Qingguo, He ; Cuizhuo, Gao ; Xiwei, Bat ; Zhengping, Zhao
Author_Institution :
Hebei Semicond. Res. Inst., Shijiazhuang, China
Abstract :
This paper reviews the recent progress in MEMS for radio frequency (RF) switches. Several structures were designed, fabricated and tested in the background of S-band application. Among these structures a compact serial switch was presented in detail. The performance of 21.0 dB isolation and 0.5 dB insertion loss was demonstrated in a HP 85 10A vector Network Analyzer while mounted on a rf carrier.
Keywords :
losses; microswitches; microwave switches; reviews; 0.5 dB; HP 85 10A vector Network Analyzer; MEMS; S-band application; compact serial RF MEMS switch; compact serial switch; insertion loss; isolation; review; Bridge circuits; Contacts; Dielectric losses; Insertion loss; Radio frequency; Radiofrequency microelectromechanical systems; Resistors; Resonance; Switches; Voltage;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on
Print_ISBN :
0-7803-6520-8
DOI :
10.1109/ICSICT.2001.981999
