The design and fabrication of a miniaturized differential-capacitive triaxial accelerometer

A novel triaxial fully-differential-capacitive accelerometer has been designed and fabricated. The accelerometer has three independent devices on a common glass substrate proof-mass detecting the acceleration vector. The designed structures of the accelerometer are analysed in detail theoretically and simulated using FEM program ANSYS. The result of the simulations show the device has sensitivities of about 17 fFg^-1, 17fFg^-1 and 16 fFg^-1 in the X-axis, Y-axis and Z-axis respectively. The fabrication combines inductively coupled plasma (ICP) high aspect ratio with glass/silicon bonding technology, thus, the devices are implemented very simply.