Title :
Design of a PZT based cantilever structure
Author :
Ren, Tian-Ling ; Zhang, Lin-Tao ; Liu, Jian-She ; Liu, Li-Tian ; Li, Zhi-Jian
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Abstract :
A PZT-based cantilever structure for microphone and microspeaker applications is designed using a multimorph model. The use of zirconate titanate (PZT) greatly improves the characteristics of the microphone and microspeaker. The sensitivity and the sound pressure level (SPL) of the integrated microphone and microspeaker are calculated. It is found that the sensitivity of the microphone and the SPL of the microspeaker are higher than those using normal piezoelectric materials.
Keywords :
acoustic intensity; acoustic transducers; ferroelectric devices; lead compounds; microphones; microsensors; piezoelectric transducers; sensitivity; PZT-based cantilever structure; Pt-Ti-PZT-Pt-Ti-SiO2-Si3N4; Pt-Ti-PbZrO3TiO3-Pt-Ti-SiO2-Si3N4; ferroelectric PZT layer; microphone applications; microspeaker applications; multimorph model; sensitivity; sound pressure level; Dry etching; Electrodes; Electronic mail; Microphones; Piezoelectric films; Piezoelectric materials; Silicon compounds; Substrates; Titanium compounds; Wet etching;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on
Print_ISBN :
0-7803-6520-8
DOI :
10.1109/ICSICT.2001.982013
