Design of a PZT based cantilever structure

Author

Ren, Tian-Ling ; Zhang, Lin-Tao ; Liu, Jian-She ; Liu, Li-Tian ; Li, Zhi-Jian

Author_Institution

Inst. of Microelectron., Tsinghua Univ., Beijing, China

Volume

2

fYear

2001

fDate

22-25 Oct. 2001

Firstpage

789

Abstract

A PZT-based cantilever structure for microphone and microspeaker applications is designed using a multimorph model. The use of zirconate titanate (PZT) greatly improves the characteristics of the microphone and microspeaker. The sensitivity and the sound pressure level (SPL) of the integrated microphone and microspeaker are calculated. It is found that the sensitivity of the microphone and the SPL of the microspeaker are higher than those using normal piezoelectric materials.

Keywords

acoustic intensity; acoustic transducers; ferroelectric devices; lead compounds; microphones; microsensors; piezoelectric transducers; sensitivity; PZT-based cantilever structure; Pt-Ti-PZT-Pt-Ti-SiO₂-Si₃N₄; Pt-Ti-PbZrO3TiO3-Pt-Ti-SiO2-Si3N4; ferroelectric PZT layer; microphone applications; microspeaker applications; multimorph model; sensitivity; sound pressure level; Dry etching; Electrodes; Electronic mail; Microphones; Piezoelectric films; Piezoelectric materials; Silicon compounds; Substrates; Titanium compounds; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on

Print_ISBN

0-7803-6520-8

Type

conf

DOI

10.1109/ICSICT.2001.982013

Filename

982013