DocumentCode
2216971
Title
Study of BAW filter using surface micromachining
Author
Peng, Cong ; Yanxiang, Liu ; Yong, Ding ; Yang, Xu ; Ren Tianling ; Litian, Liu
Author_Institution
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Volume
2
fYear
2001
fDate
22-25 Oct. 2001
Firstpage
839
Abstract
A novel structure of front end passband bulk acoustic wave (BAW) filter using surface micromachining is designed. The advantage and disadvantage of fabricating BAW RF filter using surface and bulk micromachining are discussed. Porous silicon (PS) is used as a thick sacrificial layer. The process flow for fabricating BAW filters is given.
Keywords
acoustic filters; bulk acoustic wave devices; elemental semiconductors; micromachining; porous semiconductors; silicon; BAW filter; Si; front end passband bulk acoustic wave filter; porous silicon sacrificial layer; surface micromachining; Acoustic waves; Anisotropic magnetoresistance; Band pass filters; Micromachining; Passband; Resonator filters; Silicon; Surface acoustic waves; Very large scale integration; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on
Print_ISBN
0-7803-6520-8
Type
conf
DOI
10.1109/ICSICT.2001.982026
Filename
982026
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