High-density optical disk pattern mastering using nanoimprint lithography

We demonstrated nanoimprint lithography for the high-density optical disk pattern mastering. The nickel electroplated optical disk patterns with pit lengths of ~105 nm, ~ 67 nm, and ~ 40 nm on the nanoimprinted optical disk patterns were successfully fabricated. Because of the advanced technology, it has great possibility that the next generation high-density optical disk will be manufactured by nanoimprint lithography mastering technology.