Title :
Original MEMS-Based Single Pole Double Throw Topology for Millimeter Wave Space Communications
Author :
Dubuc, David ; Rabbia, Laurent ; Grenier, Katia ; Pons, Patrick ; Vendier, Olivier ; Graffeuil, J. ; Plana, Robert
Author_Institution :
LAAS-CNRS, 7. Avenue du Colonel Roche, 31077 Toulouse Cedex 4, France; P. Sabatier University, 7. Avenue du Colonel Roche, 31077 Toulouse Cedex 4, France. Phone: + 33-5-61-33-69-40, Fax: + 33-5-61-33-69-69, E-mail: dubuc@laas.fr
Abstract :
This paper presents the design, fabrication and characterization of a MEMS-Based Single Pole Double Throw (SPDT) circuit for millimeterwave applications. High performances are achieved thanks to an original circuit design based on MEMS synthesized quarter wave line combined with surface and bulk micromachinings of silicon. 0.6 dB insertion loss of the SPDT circuit was measured with an isolation of 21dB at 30GHz.
Keywords :
Circuit synthesis; Circuit topology; Fabrication; Insertion loss; Micromachining; Micromechanical devices; Millimeter wave circuits; Performance evaluation; Silicon; Surface waves;
Conference_Titel :
Microwave Conference, 2003 33rd European
Conference_Location :
Munich, Germany
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMA.2003.341127
