DocumentCode
2217517
Title
Original MEMS-Based Single Pole Double Throw Topology for Millimeter Wave Space Communications
Author
Dubuc, David ; Rabbia, Laurent ; Grenier, Katia ; Pons, Patrick ; Vendier, Olivier ; Graffeuil, J. ; Plana, Robert
Author_Institution
LAAS-CNRS, 7. Avenue du Colonel Roche, 31077 Toulouse Cedex 4, France; P. Sabatier University, 7. Avenue du Colonel Roche, 31077 Toulouse Cedex 4, France. Phone: + 33-5-61-33-69-40, Fax: + 33-5-61-33-69-69, E-mail: dubuc@laas.fr
fYear
2003
fDate
Oct. 2003
Firstpage
979
Lastpage
982
Abstract
This paper presents the design, fabrication and characterization of a MEMS-Based Single Pole Double Throw (SPDT) circuit for millimeterwave applications. High performances are achieved thanks to an original circuit design based on MEMS synthesized quarter wave line combined with surface and bulk micromachinings of silicon. 0.6 dB insertion loss of the SPDT circuit was measured with an isolation of 21dB at 30GHz.
Keywords
Circuit synthesis; Circuit topology; Fabrication; Insertion loss; Micromachining; Micromechanical devices; Millimeter wave circuits; Performance evaluation; Silicon; Surface waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2003 33rd European
Conference_Location
Munich, Germany
Print_ISBN
1-58053-834-7
Type
conf
DOI
10.1109/EUMA.2003.341127
Filename
4143183
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