Title :
Influence Of Bicmos Processing On Thin Gate Oxide Quality
Author_Institution :
Rameen Industrial Estate
Keywords :
BiCMOS integrated circuits; Breakdown voltage; Brushes; CMOS process; Capacitors; Design for quality; Inorganic materials; Manufacturing processes; Resistors; Testing;
Conference_Titel :
Integrated Reliability Workshop Final Report, 1993 International
DOI :
10.1109/IRWS.1993.666322
