• DocumentCode
    2217696
  • Title

    In-Line Monitoring of Hot Carrier Lifetime and Its Dependency on Process Parameter for Submicron High Density DRAM Manufacturing

  • Author

    Hong, S.C. ; Shin, D.H. ; Lee, W. ; Ryu, B.-I. ; Chung, H.K.

  • Author_Institution
    Samsung Electronics Co., Ltd.
  • fYear
    1993
  • fDate
    24-27 Oct 1993
  • Firstpage
    234
  • Lastpage
    235
  • Keywords
    Condition monitoring; Current measurement; Degradation; Drain avalanche hot carrier injection; Electric variables measurement; Hot carriers; Length measurement; MOSFETs; Stress measurement; Time measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Integrated Reliability Workshop Final Report, 1993 International
  • Type

    conf

  • DOI
    10.1109/IRWS.1993.666323
  • Filename
    666323
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2217696