S-shaped magnetic macroparticle filter for cathodic arc deposition

Author

Anders, Simone ; Anders, André ; Dickinson, Michael R. ; MacGill, Robert A. ; Brown, Ian G.

Author_Institution

California Univ., Berkeley, CA, USA

Volume

2

fYear

1996

fDate

21-26 Jul 1996

Firstpage

904

Abstract

A new magnetic macroparticle filter design consisting of two 90° filters forming an S-shape is described. The transport properties of this S-filter are investigated using Langmuir and deposition probes. It is shown that the filter efficiency is the product of the efficiencies of two 90° filters and the deposition rate is still acceptably high to perform thin film deposition. Films of amorphous hard carbon have been deposited using a 90° filter and the S-filter, and the macroparticle content of the films are compared

Keywords

Langmuir probes; amorphous state; carbon; filters; magnetic field effects; plasma arc sprayed coatings; plasma arc spraying; plasma density; plasma deposited coatings; plasma deposition; plasma production; C; Langmuir probe; S-shaped magnetic macroparticle filter; amorphous hard C film; cathodic arc deposition; deposition probe; macroparticle content; thin film deposition; Amorphous magnetic materials; Cathodes; Filtering; Filters; Magnetic fields; Magnetic films; Magnetic separation; Plasma sources; Probes; Solenoids;

fLanguage

English

Publisher

ieee

Conference_Titel

Discharges and Electrical Insulation in Vacuum, 1996. Proceedings. ISDEIV., XVIIth International Symposium on

Conference_Location

Berkeley, CA

Print_ISBN

0-7803-2906-6

Type

conf

DOI

10.1109/DEIV.1996.545495

Filename

545495